Process Hierarchy

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368
on front
  Contact/proximity printing
Process characteristics:
Min feature size
Dimension of smallest feature to be resolved in the contact lithography process.
Min feature size
Dimension of smallest feature to be resolved in the contact lithography process.
unconstrained
Sides processed either
Equipment
Comments: