Process Hierarchy

on front
  Prime
Process characteristics:
Material
Material to be deposited.
Material
Material to be deposited.
Sides processed
Specify whether deposition is to occur on a single or both sides of substrate.
Sides processed
Specify whether deposition is to occur on a single or both sides of substrate.
Equipment
Comments:
  • A priming (or prime) process is used to deposit a molecular monolayer of a material on the surface of the substrate, typically to promote adhesion of another material to the substrate. It can be done by placing the substrate in a low pressure chamber to which a vapor of the material to deposited is supplied or by spin casting a liquid solution of the material on the substrate. The process is performed on either one or both sides of the substrate depending on the method.