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How to Start
About MEMS
Process development: View
Process Hierarchy
Bonding
Clean
Consulting
Deposition
Doping
Etch
LIGA
Lift off
Lithography
Mask making
Metrology
Miscellaneous
Packaging
Polishing
Process technologies
Thermal
Unique capabilities
If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at
engineering@mems-exchange.org
or call us at (703) 262-5368
Process development
Time
1 .. 40 hour
Equipment
Comments:
This process is intended for specific process development required for a novel step in a process sequence to be performed at University of Michigan.
The time required for process development will be determined on a case by case basis and will be charged at $100/hr.