Process Hierarchy

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368
on front
  Spin casting
Process characteristics:
Material
Material to be deposited.
Material
Material to be deposited.
Thickness
Thickness of film to be deposited.
Thickness
Thickness of film to be deposited.
unconstrained
Sides processed either
Equipment
Comments:
  • The substrate is held by vacuum on a chuck. The material to be deposited is dissolved in a solvent. The solution is applied to the substrate, which is then rotated at high speed. The rotation spreads the solution evenly over the surface and also causes some of the solvent to evaporate leaving a thin film of material on the substrate. The substrate is usually baked immediately after spin casting to remove the remaining solvent in the film. The process is typically performed on one side of the substrate at a time.