Process Hierarchy

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368
on front
  Spray casting
Process characteristics:
Material
Material to be deposited.
Material
Material to be deposited.
Thickness
Thickness of film to be deposited.
Thickness
Thickness of film to be deposited.
unconstrained
Sides processed either
Equipment
Comments:
  • The material to be deposited is dissolved in a solvent and sprayed in droplets from a nozzle onto the surface of the substrate. The surface tension of the solution makes the droplets merge on the substrate to form a thin film of material. The substrate is usually baked immediately after spray casting to remove the solvent in the film. The process is typically performed on one side of the substrate at a time.