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About MEMS
Miscellaneous metrology: Page 1 of 1
Process Hierarchy
Bonding
Clean
Consulting
Deposition
Doping
Etch
LIGA
Lift off
Lithography
Mask making
Metrology
Electrical metrology
Geometric metrology
Miscellaneous metrology
Miscellaneous
Packaging
Polishing
Process technologies
Thermal
Unique capabilities
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Process
X-ray inspection
AES (Auger-electron spectroscopy)
ESCA (Electron Spectroscopy for Chemical Analysis)
EDX material analysis
Spreading Resistance Analysis (SRA)
EDX material analysis
Wafer scale testing
AES (Auger-electron spectroscopy)
Cleanliness measurement
EDX (Energy Dispersive Spectrometry)
ESCA (Electron Spectroscopy for Chemical Analysis)
FTIR (Fourier Transform Infrared Spectroscopy)
GC (Gas Chromatography) mass spectroscopy
Metrology
Particle count
Residual stress measurement
SIMS (Secondary Ion Mass Spectrometry)
TEM (Transmission Electron Microscopy)
