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Capabilities
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How to Start
About MEMS
Thermal: Page 4 of 4
Process Hierarchy
Bonding
Clean
Consulting
Deposition
Doping
Etch
LIGA
Lift off
Lithography
Mask making
Metrology
Miscellaneous
Packaging
Polishing
Process technologies
Thermal
Anneal
Bake
Oxidation
Unique capabilities
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Process
Post-exposure bake (automated)
Wet TCA oxidation
Wet oxidation
Anneal
Bake
Dehydration bake
Dry oxidation
Hardbake
Nitride growth
Oxidation
Post-exposure bake
Rapid thermal anneal
Rapid thermal oxidation
Softbake
Wet oxidation
Results Page:
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