Axcelis Down Stream Plasma Asher / Stripper |
|
|---|---|
| Model | 200 ES |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 100 mm: 25, 150 mm: 25 |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
100 mm, 150 mm |
| Wafer holder Device that holds the wafers during processing. |
cassette |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
silicon on insulator, sapphire, quartz (fused silica), silicon |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
250 .. 800 µm |
