Parylene deposition system |
|
|---|---|
| Model | 2010 Labcoater 2 |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 100 mm: 3 |
| MOS clean | no |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
100 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, no-flat, notched |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
ceramic, Foturan (Schott), glass (category), Pyrex (Corning 7740), quartz (fused silica), silicon, silicon on insulator, stainless steel |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
300 .. 500 µm |