LAM 4520XLe |
|
|---|---|
| Model | 4520XLe |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 150 mm: 1 |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
150 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat |
| Wafer holder Device that holds the wafers during processing. |
electrostatic chuck |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
fused silica, Corning Eagle 2000, silicon, Corning 1737, silicon on insulator |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
300 .. 675 µm |