Sputter tool |
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|---|---|
| Model | |
| Type | commercial |
| Comments | |
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| Equipment Characteristics | |
| Batch sizes | 100 mm: 1, 125 mm: 1, 150 mm: 1, 156 mm: 1, 200 mm: 1, 300 mm: 1 |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
100 .. 300 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, notched, no-flat |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
150 .. 1000 µm |