Phase 2 - Design & Modeling

Will it work?

The performance of any MEMS device is strongly linked to the device design, processing steps, and process sequence used to make the device. Manufacturing tolerances associated with fabrication must be suitably taken into account in the MEMS device design or else the device might not work. Design for manufacturability is the hallmark of the MNX MEMS development approach. The MNX’s basic goal in designing for manufacturability is to desensitize the MEMS device’s behavior from the manufacturing variations. This means developing a device design that is as insensitive to the variations as possible, while meeting the required performance goals manufacturing yields, and cost. The MNX are experts in MEMS design and modeling. We were the first to develop a successful methodology of MEMS design for manufacturability. Our experience and methods can help save you enormous time, cost, and aggravation.

In your MEMS device Design & Modeling efforts, MNX staff can help you with the following:

• Development of a set of models, preliminary process sequence(s), and prototype mask layout set.
• Create and refine analytical and/or numerical device design models (e.g., finite-element and/or boundary-element models) to allow the accurate prediction of the physical behavior of your MEMS device.
• Predict the source and magnitude of manufacturing variations expected in a MEMS fabrication process sequence.
• Predict material properties values based on the fabrication process.
• Develop a device design and process sequence that will desensitize the device design from the fabrication manufacturing tolerances.
• Design short-loop experimental process runs based on statistical methods such as design of experiments (DOE) to allow cost effective development of device processes and process sequences.
• Create designs of test structures to accurately measure the properties of the materials used in a fabrication process.